Reconfigurable Metasurfaces in Nanoelectromechanical and Silicon-Organic Systems

Citation

Zheng, Tianzhe (2024) Reconfigurable Metasurfaces in Nanoelectromechanical and Silicon-Organic Systems. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/2kmq-da15. https://resolver.caltech.edu/CaltechTHESIS:03062024-043923772

Abstract

Over the past decade, metasurfaces, a technology referring to 2D or 3D engineered nanostructures, has demonstrated itself as a groundbreaking solution for creating compact and multifunctional optical devices. Moreover, the integration of metasurfaces with various modulation techniques enables compact yet high-performance active optical systems. In this thesis I explore various optical modes in engineered nanostructures and apply different design techniques to improve the amplitude and phase response of free-space modulators.

In Chapter 1 and 2, we first briefly introduce the concept of reconfigurable metasurfaces and its state of art. Then we introduce several nanophotonic concepts that will be used frequently in later projects and discuss the potential directions to improve modulator's performance.

In Chapter 3, we find that the dual-mode resonant metasurfaces could improve the phase response in the nanoelectromechanical system(NEMS). The interaction between the quasi-bond state in the continuum and guided mode resonance boosts the phase response up to 144 degrees.

In Chapter 4, the design target is to utilize the high-Q mode to decrease the driving voltage of the NEMS system to CMOS level. Motivated by the low-index confinement property of the slot mode, the device achieves over 10% reflection amplitude modulation with only 1.5V in the experiment. In addition, by adding a bottom gold mirror, 1.8π phase response is numerically observed. Based on the success of this device, we propose a design that could achieve subwavelength wavefront control. As a example, we show a 3-pixel optical beam deflector with 75% diffraction efficiency.

In Chapter 5, we extend the use of the slot mode into silicon-organic hybrid devices. The utilization of the slot mode achieves efficient electro-optic tuning under 17V in free space with a MHz modulation speed. We also explored various methods to enhance its phase response and discuss its feasibility. The spatial phase modulation design is also proposed with a 12-period supercell pixel. The beam deflector achieves 70% diffraction efficiency numerically.

In Chapter 6, we bring this dissertation to a close and outline potential directions for future research.

This thesis provides a foundation for the development of high-resolution and power-efficient one-dimensional spatial light modulators and showcases the potential of reconfigurable metasurfaces.

Thesis Files