Molecular Dynamics Simulation of Sputtering

Citation

Lo, Davy (1989) Molecular Dynamics Simulation of Sputtering. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/EVKV-AW57. https://resolver.caltech.edu/CaltechETD:etd-02082007-095349

Abstract

The sputtering of metals by low-energy (keV) ion bombardment has been investigated with the molecular dynamics technique. This study, based on computer simulations, aims to elucidate experimental observations and to provide valuable theoretical insight. The systems studied include Ar⁺ ion bombardment of metals, alloys, and isotopic mixtures in either the solid or liquid state. Effects of many-body interactions on the spectrum of sputtered atoms were also examined. Simulation results generally support experimental findings and render many basic assumptions of analytic sputtering theory dubious.

This thesis consists of molecular dynamics studies of several sputtering topics not directly related to each other and is organized accordingly into separate chapters. Each of these chapters will be a summary of corresponding publications published by the author during the course of his graduate study. Reprints of publications are included as appendices at the end of each chapter.

Item Type:

Thesis (Dissertation (Ph.D.))

Subject Keywords:

Molecular dynamics; metals; sputtering

Degree Grantor:

California Institute of Technology

Division:

Engineering and Applied Science

Major Option:

Applied Physics

Thesis Availability:

Public (worldwide access)

Research Advisor(s):

Tombrello, Thomas A. (advisor)
Bellan, Paul Murray (co-advisor)

Thesis Committee:

Tombrello, Thomas A. (chair)
Bellan, Paul Murray
Fultz, Brent T.
Goddard, William A., III
Johnson, William Lewis
Housley, Robert M.

Defense Date:

20 February 1989

Additional Information:

Title in 1989 commencement program -- Molecular Dynamics Simulations of Sputtering -- is different from title in thesis file (PDF).

Funders:

Funding Agency	Grant Number
NSF	UNSPECIFIED
Caltech	UNSPECIFIED

Record Number:

CaltechETD:etd-02082007-095349

Persistent URL:

https://resolver.caltech.edu/CaltechETD:etd-02082007-095349

DOI:

10.7907/EVKV-AW57

Related URLs:

URL	URL Type	Description
https://doi.org/10.1016/0168-583x(86)90059-5	DOI	Article adapted for Appendix 3.1
https://doi.org/10.1016/0168-583x(86)90525-2	DOI	Article adapted for Appendix 3.2
https://doi.org/10.1557/proc-63-31	DOI	Article adapted for Appendix 4
https://doi.org/10.1557/proc-74-449	DOI	Article adapted for Appendix 5
https://doi.org/10.1016/0168-583x(89)90976-2	DOI	Article adapted for Appendix 6
https://doi.org/10.1103/physrevb.37.7197	DOI	Article adapted for Appendix 7.1
https://doi.org/10.1116/1.575159	DOI	Article adapted for Appendix 7.2
https://doi.org/10.1557/proc-100-145	DOI	Article adapted for Appendix 7.3

Default Usage Policy:

No commercial reproduction, distribution, display or performance rights in this work are provided.

ID Code:

552

Collection:

CaltechTHESIS

Deposited By:

Imported from ETD-db

Deposited On:

01 Mar 2007

Last Modified:

17 Aug 2021 00:12

Thesis Files

PDF - Final Version
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4MB

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