Published June 1973
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Journal Article
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Channel Optical Waveguides and Directional Couplers in GaAs -- Imbedded and Ridged
Chicago
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Abstract
The development of useful integrated-optics circuits requires channel waveguides of small dimensions fabricated with close tolerances. We shall discuss techniques for forming smooth channel guides in semiconductors such as GaAs, with dimensions of the order of a few microns and show their application to directional couplers.
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© Copyright 1973 IEEE. Reprinted with permission.Files
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