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Published December 8, 2003 | Published
Journal Article Open

Argon excimer emission from high-pressure microdischarges in metal capillaries

Abstract

We report on argon excimer emission from high-pressure microdischarges formed inside metal capillaries with or without gas flow. Excimer emission intensity from a single tube increases linearly with gas pressure between 400 and 1000 Torr. Higher discharge current also results in initial intensity gains until gas heating causes saturation or intensity drop. Argon flow through the discharge intensifies emission perhaps by gas cooling. Emission intensity was found to be additive in prealigned dual microdischarges, suggesting that an array of microdischarges could produce a high-intensity excimer source.

Additional Information

© 2003 American Institute of Physics. (Received 25 August 2003; accepted 13 October 2003) We gratefully acknowledge partial support of this work by NSF (CTS-0317397).

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August 22, 2023
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