Structural study of GaSb/AlSb strained-layer superlattice
Abstract
Owing to the lattice mismatch between GaSb and AlSb, a superlattice consisting of alternating layers of these materials will be strained. We have carried out ion-channeling measurements by backscattering of 1.76-MeV He ions, and present an experimental procedure and a data-analysis technique to measure the difference in strain between the two individual layers of the superlattice. The data analysis is based on computer simulations of channeling, the accuracy of which is supported by the many fine details of the experiments reproduced in the simulations. X-ray rocking-curve analysis yielded detailed profiles of strains in directions perpendicular and parallel to the surface. The x-ray value for the strain present at an unirradiated spot on the crystal is in excellent agreement with the value calculated by elasticity theory. In the bombarded region, the values of strain are less than the value calculated by elasticity theory. It appears that bombardment by the He ions reduced the strain by 50% and created lateral inhomogeneities in the crystal structure.
Additional Information
©1985 The American Physical Society. Received 11 June 1984. The authors would like to thank S.T. Picraux for valuable discussions regarding channeling and elasticity, as well as E. Frey and D.Y. Han for assistance of the data reduction. The superlattice sample used in this work is identical to that used in Ref. 8. We acknowledge C.-A. Chang of the IBM Corporation for making such a sample available to us. Part of the work was supported by the Microelectronics Center of North Carolina. At the California Institute of Technology, two of us (V.S.S. and M-A.N.) would like to acknowledge the support of the Defense Advanced Research Projects Agency under Contract No. MDA-903-82-C-0348 (S. Roosild). Research performed at Oak Ridge National Laboratory was sponsored by the Division of Materials Sciences, U.S. Department of Energy, under Contract No. DE-AC05-840R21400 with Martin Marietta Energy Systems, Inc.Files
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2007-10-11Created from EPrint's datestamp field
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