Published January 15, 1984
| public
Journal Article
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Air-bridge microbolometer for far-infrared detection
- Creators
- Neikirk, Dean P.
- Rutledge, David B.
Abstract
A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power of 2.8×10^−11 W(Hz)^−1/2. A thermal model is also presented that accurately fits the response of the detector.
Additional Information
© 1984 American Institute of Physics. Received 22 August 1983; accepted 24 October 1983. We would like to acknowledge the support of the Jet Propulsion Laboratory through Dr. M. Litvak, and the Department of Energy under contract DEAM03-765F-00010 Task 11A.Files
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Additional details
- Eprint ID
- 10583
- Resolver ID
- CaltechAUTHORS:NEIapl84
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2008-05-21Created from EPrint's datestamp field
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2021-11-08Created from EPrint's last_modified field