Published November 28, 2005
| public
Journal Article
Open
Controlled nonuniformity in macroporous silicon pore growth
- Creators
- Matthias, Sven
- Müller, Frank
- Gösele, Ulrich
Chicago
An error occurred while generating the citation.
Abstract
Photoelectrochemical etching of uniform prestructured silicon wafers in hydrofluoric acid containing solutions yields periodic structures that can be applied to two- and three-dimensional photonic crystals or microfluidics. Here we demonstrate experimentally macroporous silicon etching initiated by a nonuniform predefined lattice. For conveniently chosen parameters we observe a stable growth of pores whose geometrical appearance depends strongly on the spatially different nucleation conditions. Moreover, we show preliminary results on three-dimensionally shaped pores. This material can be used to realize hybrid photonic crystal structures and incorporate waveguides in three-dimensional photonic crystals.
Additional Information
Copyright © 2005 American Institute of Physics. Received 16 September 2005; accepted 12 October 2005; published online 23 November 2005. The authors thank B. Hasler (Infineon Technologies) for the supply of surface-structured silicon wafers. This project was partly financed by a research award for young scientists given by the government of Saxony-Anhalt in 2003 to one of the authors (S.M.).Files
MATapl05.pdf
Files
(395.3 kB)
| Name | Size | Download all |
|---|---|---|
|
md5:b2045811af9c3335a3002e512e73823e
|
395.3 kB | Preview Download |
Additional details
- Eprint ID
- 2116
- Resolver ID
- CaltechAUTHORS:MATapl05
- Created
-
2006-03-09Created from EPrint's datestamp field
- Updated
-
2021-11-08Created from EPrint's last_modified field