Published November 28, 2005
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Journal Article
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Controlled nonuniformity in macroporous silicon pore growth
- Creators
- Matthias, Sven
- Müller, Frank
- Gösele, Ulrich
Abstract
Photoelectrochemical etching of uniform prestructured silicon wafers in hydrofluoric acid containing solutions yields periodic structures that can be applied to two- and three-dimensional photonic crystals or microfluidics. Here we demonstrate experimentally macroporous silicon etching initiated by a nonuniform predefined lattice. For conveniently chosen parameters we observe a stable growth of pores whose geometrical appearance depends strongly on the spatially different nucleation conditions. Moreover, we show preliminary results on three-dimensionally shaped pores. This material can be used to realize hybrid photonic crystal structures and incorporate waveguides in three-dimensional photonic crystals.
Additional Information
Copyright © 2005 American Institute of Physics. Received 16 September 2005; accepted 12 October 2005; published online 23 November 2005. The authors thank B. Hasler (Infineon Technologies) for the supply of surface-structured silicon wafers. This project was partly financed by a research award for young scientists given by the government of Saxony-Anhalt in 2003 to one of the authors (S.M.).Files
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Additional details
- Eprint ID
- 2116
- Resolver ID
- CaltechAUTHORS:MATapl05
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2006-03-09Created from EPrint's datestamp field
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