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Published May 1988 | public
Journal Article Open

Theoretical studies of ion bombardment: Many-body interactions

Abstract

Many-body forces obtained by the embedded-atom method are incorporated into the description of low-energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardment of small, single-crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {111}) by 5-keV Ar + ions have been simulated. The results are compared to simulations using purely pairwise additive interactions. Significant differences in the spectra of ejected atoms are found.

Additional Information

© 1988 American Vacuum Society (Received 18 September 1987; accepted 26 October 1987) This work was supported in part by the National Science Foundation, Grant No. DMR84-21119.

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