Published December 1, 1988
| public
Journal Article
Open
X-ray diffractometer stage for in situ structural analysis of thin films
- Creators
- Johnson, R. W.
- Johnson, W. L.
Abstract
A theta-two theta x-ray diffractometer stage has been developed for in situ structural characterization of thin-film samples. This stage integrates an ultrahigh vacuum dc ion-beam thin-film sample preparation chamber with the Siemens D500 x-ray diffractometer. In vacuo sample translation and manipulation is provided. The stage incorporates resistive heating to 900 K and liquid nitrogen cooling to 150 K. The sample theta rotation is transmitted into the vacuum chamber by a rotary feedthrough. X rays enter the vacuum chamber through a beryllium window with allowed reflection angles from 0 to +168° two-theta.
Additional Information
Copyright © 1988 American Institute of Physics (Received 7 July 1988; accepted 19 August 1988) This work has been supported by the National Science Foundation-Materials Research Groups Grant No. DMR 8421119.Files
JOHrsi88.pdf
Files
(722.7 kB)
| Name | Size | Download all |
|---|---|---|
|
md5:9cc01daad2ce47a78c939bdd1c9a6186
|
722.7 kB | Preview Download |
Additional details
- Eprint ID
- 5770
- Resolver ID
- CaltechAUTHORS:JOHrsi88
- Created
-
2006-11-01Created from EPrint's datestamp field
- Updated
-
2021-11-08Created from EPrint's last_modified field