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Published August 11, 2003 | Published
Journal Article Open

Nanowire-based very-high-frequency electromechanical resonator

Abstract

Fabrication and readout of devices with progressively smaller size, ultimately down to the molecular scale, is critical for the development of very-high-frequency nanoelectromechanical systems (NEMS). Nanomaterials, such as carbon nanotubes or nanowires, offer immense prospects as active elements for these applications. We report the fabrication and measurement of a platinum nanowire resonator, 43 nm in diameter and 1.3 µm in length. This device, among the smallest NEMS reported, has a fundamental vibration frequency of 105.3 MHz, with a quality factor of 8500 at 4 K. Its resonant motion is transduced by a technique that is well suited to ultrasmall mechanical structures.

Additional Information

© 2003 American Institute of Physics. (Received 8 November 2002; accepted 25 June 2003) The authors gratefully acknowledge support from DARPA/MTO and SPAWAR via Grant No. N66001-01-X-6004/02-8914/1000000928 and from the NSF via Grant No. ECS-0089061. H.W.Ch.P. acknowledges support, in part, from the Netherlands Organization for Scientific Research (NWO).

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