Coarsening model of cavity nucleation and thin film delamination from single-crystal BaTiO3 with proton implantation

Abstract

The layer splitting mechanism of a proton implanted single crystal ferroelectric BaTiO3 thin film layer from its bulk BaTiO3 substrate has been investigated. The single crystal BaTiO3 thin film layer splits as the hydrogen gas diffuses and the internal cavity pressure increases. Ripening mechanism driven by the pressurized hydrogen in the implantation-induced damage zone makes coarsening of the cavities and causes the delamination of the thin layer during the annealing. A unique criterion relation of blister nucleation and evolution has been derived and a simplified debonding criterion is proposed in terms of dimensionless parameters based on the force equilibrium condition. A numerical simulation of two-bubble evolution and delamination of thin film is performed using a finite element method.

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