Published January 15, 1985
| Published
Journal Article
Open
An inert marker study for palladium silicide formation: Si moves in polycrystalline Pd2Si
- Creators
- Ho, K. T.
- Lien, C.-D.
- Shreter, U.
- Nicolet, M-A.
Chicago
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Abstract
A novel use of Ti marker is introduced to investigate the moving species during Pd2Si formation on <111> and <100> Si substrates. Silicide formed from amorphous Si is also studied using a W marker. Although these markers are observed to alter the silicide formation in the initial stage, the moving species can be identified once a normal growth rate is resumed. It is found that Si is the dominant moving species for all three types of Si crystallinity. However, Pd will participate in mass transport when Si motion becomes obstructed.
Additional Information
Copyright © 1985 American Institute of Physics. Received 13 June 1984; accepted 1 August 1984. The authors would like to acknowledge Ali Ghaffari for technical assistance. The implanter part of this study was financially supported by the U.S. Department of Energy through an agreement with the National Aeronautics and Space Administration and monitored by the Jet Propulsion Laboratory, California Institute of Technology (D. Burger).Attached Files
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- 12602
- Resolver ID
- CaltechAUTHORS:HOKjap85b
- Department of Energy
- NASA
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2008-12-15Created from EPrint's datestamp field
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2021-11-08Created from EPrint's last_modified field