Published November 1, 2002
| Published
Journal Article
Open
Reflection high-energy electron diffraction analysis of polycrystalline films with grain size and orientation distributions
- Creators
- Hartman, J. W.
- Brewer, R. T.
-
Atwater, Harry A.
Abstract
We report a computationally efficient algorithm to calculate reflection high-energy electron diffraction (RHEED) intensities from well-textured, small-grained polycrystalline films in the kinematic limit. We also show how the intensity maps of the spots in a RHEED pattern from such a film can be quantitatively analyzed to determine the film's average grain size, as well as its in-plane orientation and texture distributions. We find that the in-plane orientation and texture distribution widths of these films can be determined to within 1 degree and that the average lateral grain size can be measured to within a fraction of a nanometer after suitable calibration of our technique.
Additional Information
© 2002 American Institute of Physics. Received 24 June 2002; accepted 5 August 2002. This work was supported by the DARPA Virtual Integrated Prototyping program and ARO MURI on "Engineering Microstructural Complexity in Ferroelectric Thin Films," Grant No. DAAD 19-01-1-0517. One of us (R.T.B.) is grateful for support from the Intel Foundation.Attached Files
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Additional details
- Eprint ID
- 3709
- Resolver ID
- CaltechAUTHORS:HARjap02
- Defense Advanced Research Projects Agency (DARPA)
- Army Research Office (ARO)
- DAAD 19-01-1-0517
- Intel Foundation
- Created
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2006-06-29Created from EPrint's datestamp field
- Updated
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2021-11-08Created from EPrint's last_modified field