Published December 1, 1993
| public
Journal Article
Open
Scaling laws for diamond chemical-vapor deposition. II. Atomic hydrogen transport
- Creators
- Goodwin, D. G.
Chicago
An error occurred while generating the citation.
Abstract
Scaling relations are developed to allow estimation of the atomic hydrogen concentration at the substrate during diamond chemical-vapor deposition for both diffusion-dominated and convection-dominated reactors. In the convection-dominated case, it is shown that there exists an optimal Mach number which maximizes the H concentration delivered to the substrate. In addition, when homogeneous recombination is taken into account, there exists an optimal operating pressure. This analysis shows that a sonic flow of highly dissociated hydrogen at a pressure near atmospheric is optimal for rapid growth of high-quality diamond.
Additional Information
Copyright © 1993 American Institute of Physics (Received 14 June 1993; accepted 31 July 1993) Helpful discussions with C. Brennen, A. Acosta, R. Sabersky, N. Glumac, and S. Harris are greatly appreciated. This work is supported, in part, by the National Science Foundation, the Office of Naval Research, and the Naval Research Laboratory.Files
GOOjap93b.pdf
Files
(1.6 MB)
| Name | Size | Download all |
|---|---|---|
|
md5:a5cca9bbd1009ca792695db302a241ef
|
1.6 MB | Preview Download |
Additional details
- Eprint ID
- 1408
- Resolver ID
- CaltechAUTHORS:GOOjap93b
- Created
-
2006-01-17Created from EPrint's datestamp field
- Updated
-
2021-11-08Created from EPrint's last_modified field