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Published May 25, 1992 | public
Journal Article Open

Diamond growth in a novel low pressure flame

Abstract

Diamond growth using a new low-pressure combustion technique is reported. A large-area hydrogen/oxygen flame is used as the source of atomic hydrogen. Methane diluted in hydrogen is injected into the flame near a heated silicon substrate, on which diamond crystallites nucleate and grow. This technique is potentially capable of large-area film growth, since atomic hydrogen can be generated uniformly over arbitrarily large areas.

Additional Information

© 1992 American Institute of Physics. Received 7 February 1992; accepted for publication 26 March 1992. We would like to thank Dr. J.E. Butler at NRL for performing the Raman analysis. We also gratefully acknowledge financial support for this work from the National Science Foundation and Norton Co.

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