Balanced electronic detection of displacement in nanoelectromechanical systems

Abstract

We describe a broadband radio frequency balanced bridge technique for electronic detection of displacement in nanoelectromechanical systems (NEMS). With its two-port actuation-detection configuration, this approach generates a background-nulled electromotive force in a dc magnetic field that is proportional to the displacement of the NEMS resonator. We demonstrate the effectiveness of the technique by detecting small impedance changes originating from NEMS electromechanical resonances that are accompanied by large static background impedances at very high frequencies. This technique allows the study of important experimental systems such as doped semiconductor NEMS and may provide benefits to other high frequency displacement transduction circuits.

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