Fabrication technologies for quantum cascade photonic-crystal microlasers

Abstract

In this paper we describe the technological and fabrication methods necessary to incorporate both photonic and electronic-band engineering in order to create novel surface-emitting quantum cascade microcavity laser sources. This technology offers the promise of several innovative applications such as the miniaturization of QC lasers, and multi-wavelength two-dimensional laser arrays for spectroscopy, gas-sensing and imaging. This approach is not limited to light-emitting devices, and may be efficiently applied to the development of mid- and far-infrared normal-incidence detectors.

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