A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy
- Creators
-
Chasiotis, Ioannis
- Knauss, Wolfgang G.
Abstract
An apparatus has been designed and implemented to measure the elastic tensile properties (Young's modulus and tensile strength) of surface micromachined polysilicon specimens. The tensile specimens are "dog-bone" shaped ending in a large "paddle" for convenient electrostatic or, in the improved apparatus, ultraviolet (UV) light curable adhesive gripping deposited with electrostatically controlled manipulation. The typical test section of the specimens is 400 µm long with 2 µm x 50 µm cross section. The new device supports a nanomechanics method developed in our laboratory to acquire surface topologies of deforming specimens by means of Atomic Force Microscopy (AFM) to determine (fields of) strains via Digital Image Correlation (DIC). With this tool, high strength or non-linearly behaving materials can be tested under different environmental conditions by measuring the strains directly on the surface of the film with nanometer resolution.
Additional Information
© Society for Experimental Mechanics, Inc. 2002. Original manuscript submitted: July 20, 2000. Final manuscript received: October 18, 2001. The authors gratefully acknowledge support by the Airforce Office of Scientific Research through grant F49629-97-1-0324 (Round Robin Program), and under grant F49620- 99-1-0091, with Major Brian Sanders, Drs. O. Ochoa, D. Segalman and T. Hahn as the monitors.Additional details
- Eprint ID
- 19
- Resolver ID
- CaltechAUTHORS:CHAem02
- F49629-97-1-0324
- Air Force Office of Scientific Research (AFOSR)
- F49620- 99-1-0091
- Air Force Office of Scientific Research (AFOSR)
- Created
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2004-11-30Created from EPrint's datestamp field
- Updated
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2023-08-22Created from EPrint's last_modified field
- Caltech groups
- GALCIT