Published January 15, 2001
| Published
Journal Article
Open
Stiction, adhesion energy, and the Casimir effect in micromechanical systems
- Creators
- Buks, E.
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Roukes, M. L.
Chicago
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Abstract
We measure the adhesion energy of gold using a micromachined cantilever beam. Stress and stiffness of the beam are characterized by measuring the spectrum of mechanical vibrations and the deflection due to external force. We induce stiction between the beam and a nearby surface, employing capillary forces to determine the adhesion energy γ. The obtained value γ=0.06 J/m^2 is a factor of 6 smaller than that predicted by idealized theory. This discrepancy may arise from surface roughness or an adsorbed layer intervening between the contacting surfaces in these mesoscopic structures.
Additional Information
© 2001 The American Physical Society Received 3 August 2000; revised 5 October 2000; published 2 January 2001 The authors are grateful to K. Schwab for his assistance in sample fabrication and Y. Buks for image processing of the SEM micrographs. This research was supported by the Rothschild Foundation, the R. A. Millikan Foundation at Caltech, and DARPA MTO/MEMS under Grant No. DABT63-98-1-0012.Attached Files
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Additional details
- Eprint ID
- 2074
- Resolver ID
- CaltechAUTHORS:BUKprb01
- Rothschild Foundation
- Caltech Millikan Fellowship
- Defense Advanced Research Projects Agency (DARPA)
- DABT63-98-1-0012
- Created
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2006-03-06Created from EPrint's datestamp field
- Updated
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2021-11-08Created from EPrint's last_modified field