Published October 1926
| public
Journal Article
Open
A new sputtering apparatus
- Creators
- Badger, Richard M.
Chicago
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Abstract
The writer, in sputtering a large number of mirrors, has found that the apparatus and methods to be described have several advantages, particularly where very large and perfect mirrors are desired. The accompanying diagram will be self explanatory, and the dimensions given have been found convenient for mirrors up to 10 cm diameter.
Additional Information
© Copyright 1926 Optical Society of America. Received February 11, 1926. We are indebted to Mr. Julius Pearson of the instrument shop of this Institute for this detail of construction.Files
BADjosa26.pdf
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Additional details
- Eprint ID
- 10463
- Resolver ID
- CaltechAUTHORS:BADjosa26
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2008-05-07Created from EPrint's datestamp field
- Updated
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2019-10-03Created from EPrint's last_modified field