Published September 1, 2003
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Statistical analysis of integrated passive delay lines
- Creators
- Analui, Behnam
-
Hajimiri, Ali
Abstract
Statistical properties of integrated passive LC delay lines are investigated. A new variation using spiral inductors and vertical parallel plate (VPP) capacitors is introduced whose delay is primarily determined by the lateral dimensions, resulting in very accurate and repeatable delays. An MIM-based version of this line is also fabricated for comparison. Additionally, LC delay-based oscillators are implemented to compare the variations in active and passive delay elements. Experimental data is obtained from measurement of 27 and 47 sites on two wafers from two different process runs, respectively. The measurements show 0.6% delay variations for VPP-based delay line compared to 1.0% for its MIM-based counterpart.
Additional Information
© Copyright 2003 IEEE. Reprinted with permission. Publication Date: 21-24 Sept. 2003. The authors acknowledge M. Owrang for assistance in measurement and valuable feedbacks. They are also grateful to A. Komijani, S. Mandegaran, and I. Buck-Walter from Caltecb's CHIC group for useful discussions and helps. They thank Lee Center for Advanced Networking, IBM, and Agilent Technologies for supporting this project.Files
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