Nano-electromechanical spatial light modulator enabled by asymmetric resonant dielectric metasurfaces
- Creators
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Kwon, Hyounghan
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Zheng, Tianzhe
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Faraon, Andrei
Abstract
Spatial light modulators (SLMs) play essential roles in various free-space optical technologies, offering spatio-temporal control of amplitude, phase, or polarization of light. Beyond conventional SLMs based on liquid crystals or microelectromechanical systems, active metasurfaces are considered as promising SLM platforms because they could simultaneously provide high-speed and small pixel size. However, the active metasurfaces reported so far have achieved either limited phase modulation or low efficiency. Here, we propose nano-electromechanically tunable asymmetric dielectric metasurfaces as a platform for reflective SLMs. Exploiting the strong asymmetric radiation of perturbed high-order Mie resonances, the metasurfaces experimentally achieve a phase-shift close to 290∘, over 50% reflectivity, and a wavelength-scale pixel size. Electrical control of diffraction patterns is also achieved by displacing the Mie resonators using nano-electro-mechanical forces. This work paves the ways for future exploration of the asymmetric metasurfaces and for their application to the next-generation SLMs.
Additional Information
© The Author(s) 2022. This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. This work was supported by the National Institutes of Health (NIH) brain initiative program, grant NIH 1R21EY029460-01. The device nanofabrication was performed at the Kavli Nanoscience Institute at Caltech. H.K. acknowledges a fellowship from Ilju organization. Author contributions. H.K. and A.F. conceived the project. H.K. designed structures, fabricated devices, and performed simulations and measurements. H.K. and T.Z. analyzed data. T.Z. designed and prepared the printed circuit boards. H.K. and A.F. wrote the manuscript. All authors discussed the results and commented on the manuscript. Data availability. The main dataset generated in this study has been deposited in CaltechData under accession code: 10.22002/D1.20291. Code availability. The main codes generated in this study have been deposited in CaltechData under accession code: 10.22002/D1.20291. The authors declare no competing interests.Attached Files
Published - 41467_2022_Article_33449.pdf
Supplemental Material - 41467_2022_33449_MOESM1_ESM.pdf
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Additional details
- PMCID
- PMC9530114
- Eprint ID
- 117491
- Resolver ID
- CaltechAUTHORS:20221019-342695600.2
- NIH
- 1R21EY029460-01
- Kavli Nanoscience Institute
- Ilju Foundation of Education & Culture
- Created
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2022-10-27Created from EPrint's datestamp field
- Updated
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2023-07-06Created from EPrint's last_modified field
- Caltech groups
- Kavli Nanoscience Institute