Published May 2021 | Published
Book Section - Chapter Open

Sidelobe-Free Beam-Steering using Optical Phased Arrays for Neural Probes

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Abstract

We demonstrate implantable neural probes with integrated silicon nitride optical phased arrays (OPAs) fabricated on 200mm wafers for wavelengths near 480nm. A free-propagation slab enables the emission of a single steerable beam from an OPA.

Additional Information

© 2021 The Author(s). The authors thank Dr. A. Stalmashonak for experimental assistance.

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Created:
August 20, 2023
Modified:
December 22, 2023