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Published September 11, 2021 | public
Book Section - Chapter

LiNbO₃ High Order Lamb Wave Resonators with Composite Plate Structure

Abstract

The paper demonstrates the design and analysis of high-order asymmetric (A) and symmetric (S) resonators with the structure of Z-cut Lithium Niobate (LiNbO₃) thin film and silicon oxide (SiO₂) layer. This structure can enable high frequency of more than 3.5 GHz of high-order A mode and S mode. It can also achieve high electromechanical coupling coefficient (kt2) of 22.1% in S² mode and 17.1% of A3 mode by setting the thickness ratio of LiNbO₃ thin film and SiO₂ layer in theory. Such a high coupling coefficient enables the large bandwidth of acoustic-based RF filters.

Additional Information

© 2021 IEEE. The authors appreciate the support from the Natural Science Foundation of Shanghai (19ZR1477000) and National Natural Science Foundation of China (61874073).

Additional details

Created:
August 20, 2023
Modified:
October 23, 2023