Published September 11, 2021
| public
Book Section - Chapter
LiNbO₃ High Order Lamb Wave Resonators with Composite Plate Structure
- Creators
- Liu, Yushuai
- Gao, Zhiyuan
- Lu, Yaoqing
- Wu, Tao
Abstract
The paper demonstrates the design and analysis of high-order asymmetric (A) and symmetric (S) resonators with the structure of Z-cut Lithium Niobate (LiNbO₃) thin film and silicon oxide (SiO₂) layer. This structure can enable high frequency of more than 3.5 GHz of high-order A mode and S mode. It can also achieve high electromechanical coupling coefficient (kt2) of 22.1% in S² mode and 17.1% of A3 mode by setting the thickness ratio of LiNbO₃ thin film and SiO₂ layer in theory. Such a high coupling coefficient enables the large bandwidth of acoustic-based RF filters.
Additional Information
© 2021 IEEE. The authors appreciate the support from the Natural Science Foundation of Shanghai (19ZR1477000) and National Natural Science Foundation of China (61874073).Additional details
- Alternative title
- LiNbO3 High Order Lamb Wave Resonators with Composite Plate Structure
- Eprint ID
- 112720
- DOI
- 10.1109/ius52206.2021.9593547
- Resolver ID
- CaltechAUTHORS:20220105-278608200
- 19ZR1477000
- Natural Science Foundation of Shanghai
- 61874073
- National Natural Science Foundation of China
- Created
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2022-01-09Created from EPrint's datestamp field
- Updated
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2022-01-09Created from EPrint's last_modified field