Selective-Area, Water-Free Atomic Layer Deposition of Metal Oxides on Graphene Defects
Abstract
Passivating defective regions on monolayer graphene with metal oxides remains an active area of research for graphene device integration. To effectively passivate these regions, a water-free atomic layer deposition (ALD) recipe was developed and yielded selective-area ALD (sa-ALD) of mixed-metal oxides onto line defects in monolayer graphene. The anisotropically deposited film targeted high-energy defect sites that were formed during synthesis or transfer of the graphene layer. The passivating layer exceeded 10 nm thickness with minimal deposition onto the basal plane of graphene. The mixed-metal oxide film was of comparable quality to films deposited using nonselective water-based ALD methods, as shown by X-ray photoelectron spectroscopy. The development of sa-ALD techniques to target defect regions on the graphene sheet, while keeping the basal plane intact, will provide a new mechanism to passivate graphene defects and modify the electronic and physical properties of graphene.
Additional Information
© 2021 The Authors. Published by American Chemical Society. Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0). Received 20 September 2021. Accepted 11 November 2021. Revised 9 November 2021. Published online 19 November 2021. M.F.M. and N.S.L. acknowledge support from the U.S. Department of Energy under Award DE-FG02-04ER15483. M.C. acknowledges support from the Ford Foundation under the Postdoctoral Scholar Fellowship program. M.C. acknowledges support from the National Science Foundation CCI Solar Fuels Program under Grant No. CHE-1305124. A.C.T. and M.C.M. acknowledge support from National Science Foundation graduate research fellowships. M.C.M. also acknowledges the Resnick Sustainability Institute at Caltech for fellowship support. Research was in part carried out at the Molecular Materials Research Center in the Beckman Institute at the California Institute of Technology. The authors declare no competing financial interest.Attached Files
Published - acsmaterialsau.1c00049.pdf
Supplemental Material - mg1c00049_si_001.pdf
Files
Name | Size | Download all |
---|---|---|
md5:2e336c33dae9f9ffa3d91356702d533a
|
700.5 kB | Preview Download |
md5:966bceddc61a05d28e9a7ce51808ab08
|
4.2 MB | Preview Download |
Additional details
- PMCID
- PMC9888651
- Eprint ID
- 112157
- Resolver ID
- CaltechAUTHORS:20211201-231211106
- Department of Energy (DOE)
- DE-FG02-04ER15483
- Ford Foundation
- NSF
- CHE-1305124
- NSF Graduate Research Fellowship
- Resnick Sustainability Institute
- Created
-
2021-12-02Created from EPrint's datestamp field
- Updated
-
2023-07-06Created from EPrint's last_modified field
- Caltech groups
- Resnick Sustainability Institute, CCI Solar Fuels