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Published October 20, 2021 | Supplemental Material + Accepted Version
Journal Article Open

NEMS-Tunable Dielectric Chiral Metasurfaces

Abstract

Active control of strong chiroptical responses in metasurfaces can offer new opportunities for optical polarization engineering. Plasmonic active chiral metasurfaces have been investigated before, but their tunable chiroptical responses are limited due to inherent loss of plasmonic resonances, thus stimulating research in low loss active dielectric chiral metasurfaces. Among diverse tuning methods, electrically tunable dielectric chiral metasurfaces are promising thanks to their potential for on-chip integration. Here, we experimentally demonstrate nanoelectromechanically tunable dielectric chiral metasurfaces with reflective circular dichroism (CD). We show CD in absoulte reflection over 0.85 in simulation and 0.45 experimentally. The devices enable continuous control of CD by induced electrostatic forces from 0.45 to 0.01 with an electrical bias below 3 V. This work highlights the potential of nanoelectromechanically tunable metasurfaces for scalable optical polarization modulators.

Additional Information

© 2021 American Chemical Society. Received: June 18, 2021; Published: September 8, 2021. We thank Tianzhe Zheng for helpful discussion and preparation of printed circuit boards. This work was supported by the National Institutes of Health (NIH) brain initiative program, Grant NIH 1R21EY029460-01. The device nanofabrication was performed at the Kavli Nanoscience Institute at Caltech. H.K. acknowledges a fellowship from Ilju organization. Author Contributions: H.K. and A.F. conceived the project; H.K. designed the device, fabricated the samples, performed the measurements, and analyzed the data under the supervision of A.F.; H.K. and A.F. cowrote the manuscript. The authors declare no competing financial interest.

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Accepted Version - nihms-1777989.pdf

Supplemental Material - ph1c00898_si_001.pdf

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Additional details

Created:
August 22, 2023
Modified:
October 23, 2023