Nano-electromechanical Tuning of Dual-Mode Resonant Dielectric Metasurfaces for Dynamic Amplitude and Phase Modulation
- Creators
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Kwon, Hyounghan
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Zheng, Tianzhe
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Faraon, Andrei
Abstract
Planar all-dielectric photonic crystals or metasurfaces host various resonant eigenmodes including leaky guided mode resonances (GMR) and bound states in the continuum (BIC). Engineering these resonant modes can provide new opportunities for diverse applications. Particularly, electrical control of the resonances will boost development of the applications by making them tunable. Here, we experimentally demonstrate nano-electromechanical tuning of both the GMR and the quasi-BIC modes in the telecom wavelength range. With electrostatic forces induced by a few volts, the devices achieve spectral shifts over 5 nm, absolute intensity modulation over 40%, and modulation speed exceeding 10 kHz. We also show that the interference between two resonances enables the enhancement of the phase response when two modes are overlapped in spectrum. A phase shift of 144° is experimentally observed with a bias of 4 V. Our work suggests a direct route toward optical modulators through the engineering of GMRs and quasi-BIC resonances.
Additional Information
© 2021 American Chemical Society. Received: December 12, 2020; Revised: February 1, 2021; Published: February 5, 2021. We thank Jeong Oen Lee for helpful discussion about nano-electromechanical systems. This work was supported by the National Institutes of Health (NIH) brain initiative program, grant NIH 1R21EY029460-01. The device nanofabrication was performed at the Kavli Nanoscience Institute at Caltech. H.K. acknowledges a fellowship from Ilju organization. Author Contributions. H.K. and T.Z. contributed equally. H.K. and A.F. conceived the project. H.K. designed the device. H.K. and T.Z. fabricated the samples, performed the measurements, and analyzed the data. All authors cowrote the manuscript. The authors declare no competing financial interest.Attached Files
Accepted Version - nihms-1777851.pdf
Supplemental Material - nl0c04888_si_001.pdf
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Additional details
- Alternative title
- Nanoelectromechanical tuning of dual-mode resonant dielectric metasurfaces for dynamic amplitude and phase modulation
- PMCID
- PMC8890003
- Eprint ID
- 107958
- Resolver ID
- CaltechAUTHORS:20210208-144010825
- NIH
- 1R21EY029460-01
- Ilju Foundation of Education & Culture
- Created
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2021-02-09Created from EPrint's datestamp field
- Updated
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2022-03-15Created from EPrint's last_modified field
- Caltech groups
- Kavli Nanoscience Institute