Published May 2020
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High-Q suspended optical resonators in 3C-SiC obtained by thermal annealing
Abstract
We fabricate suspended single-mode optical waveguides and ring resonators in 3C-SiC that operate at telecommunication wavelength, leverage post-fabrication thermal annealing to minimize optical propagation losses and demonstrate Q of over 41,000.
Additional Information
© 2020 The Author(s). This work was carried out at the Harvard Center for Nanoscale Systems (CNS), a member of the National Nanotechnology Infrastructure Network (NNIN).Attached Files
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- Eprint ID
- 105560
- Resolver ID
- CaltechAUTHORS:20200925-133309823
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2020-09-25Created from EPrint's datestamp field
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2021-11-16Created from EPrint's last_modified field