Miniaturization of a-Si guided mode resonance filter arrays for near-IR multi-spectral filtering
Abstract
Sub-wavelength periodic arrays exhibit narrow near-unity reflection bands that arise from guided mode resonances. These resonances have extremely high quality factor (i.e., narrow band features) and are ideal for filtering applications. A high quality factor requires many periods, causing large lateral footprints that limit an imaging system's spatial resolution. We present a 1D ultra-thin (<100 nm) compact finite design of seven periods of amorphous Si slabs with subwavelength periodicity surrounded by Al mirrors, which allow the finite array to approximate an infinite array and enabling a small footprint (∼5 μm), for near-infrared applications (λ = 800–2000 nm). We demonstrate spectral tunability (amplitude, bandwidth, and peak location) via geometric parameter variation and demonstrate the performance of these filters both in experiment and in simulation. This work miniaturizes guided-mode resonance filters, previously limited by extremely large footprints, while being relatively cheap and simple to fabricate compared to many existing designs.
Additional Information
© 2020 The Author(s). Published under license by AIP Publishing. Submitted: 6 August 2020. Accepted: 3 September 2020. Published Online: 18 September 2020. The authors gratefully acknowledge the financial support of the Department of Defense through J.R.G.'s Vannevar-Bush Faculty Fellowship (No. N00014-16-1-2827) and the critical support and infrastructure provided by the Kavli Nanoscience Institute at Caltech. The authors also thank Harry Atwater for computational resources used to calculate a portion of these results. DATA AVAILABILITY. The data that support the findings of this study are available from the corresponding author upon reasonable request.Attached Files
Published - 5.0024302
Supplemental Material - compactsi_vf_apl.pdf
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Additional details
- Eprint ID
- 105525
- Resolver ID
- CaltechAUTHORS:20200924-144351561
- Vannever Bush Faculty Fellowship
- N00014-16-1-2827
- Created
-
2020-09-25Created from EPrint's datestamp field
- Updated
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2021-11-16Created from EPrint's last_modified field
- Caltech groups
- Kavli Nanoscience Institute