Rapid fabrication of high-resolution multi-scale microfluidic devices based on the scanning of patterned femtosecond laser
Abstract
Femtosecond-laser-induced two-photon polymerization has distinct advantages in micro-nanofabrication due to its intrinsic three-dimensional processing capability and high precision with sub-100 nanometer fabrication resolution. However, the high resolution causes a drawback in fabricating large-scale structures due to unacceptably long processing times. To solve this problem, we applied the patterned focus as the basic element for scanning processing. Theoretically, the relationship between patterned-focus scanning parameters and the uniformity of scanned light field was analyzed and optimized. Experimentally, we quantitatively investigated the relationship between the microstructure surface quality and the parameters of patterned-focus scanning. Based on above, we put forward a hybrid method that combines the femtosecond laser patterned exposure with direct-writing fabrication to rapidly fabricate large-scale microfluidic devices for various practical applications.
Additional Information
© 2020 Optical Society of America. Received 7 May 2020; revised 1 June 2020; accepted 1 June 2020; posted 8 June 2020 (Doc. ID 397078); published 10 July 2020. We acknowledge the Experimental Center of Engineering and Materials Sciences at USTC for the fabrication and measurement of the samples. This work was partly carried out at the USTC Center for Micro and Nanoscale Research and Fabrication. Funding: National Key Research and Development Program of China (2018YFB1105400); National Natural Science Foundation of China (11801126, 51675503, 51805509, 51875544, 61805230); the Aeronautical Science Fund (2018ZE78004); Fundamental Research Funds for the Central Universities (JZ2019YYPY0024, WK2090000011, WK2090000013, WK603000103, WK603000131); Youth Innovation Promotion Association of the Chinese Academy of Sciences (2017495); Foundation of Equipment Development Department (62209140 10901). Disclosures: The authors declare no conflicts of interest.Additional details
- Eprint ID
- 104951
- Resolver ID
- CaltechAUTHORS:20200813-094025869
- 2018YFB1105400
- National Basic Research Program of China
- 11801126
- National Natural Science Foundation of China
- 51675503
- National Natural Science Foundation of China
- 51805509
- National Natural Science Foundation of China
- 51875544
- National Natural Science Foundation of China
- 61805230
- National Natural Science Foundation of China
- 2018ZE78004
- Chinese Aeronautical Establishment
- JZ2019YYPY0024
- Fundamental Research Funds for the Central Universities
- WK2090000011
- Fundamental Research Funds for the Central Universities
- WK2090000013
- Fundamental Research Funds for the Central Universities
- WK603000103
- Fundamental Research Funds for the Central Universities
- WK603000131
- Fundamental Research Funds for the Central Universities
- 2017495
- Youth Innovation Promotion Association of the Chinese Academy of Sciences
- 62209140 10901
- Foundation of Equipment Development Department
- Created
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2020-08-13Created from EPrint's datestamp field
- Updated
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2021-11-16Created from EPrint's last_modified field