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Published April 15, 2011 | Published
Journal Article Open

Reflective silicon binary diffraction grating for visible wavelengths

Abstract

We introduce a device based on subwavelength resonant grating technology. Using a single lithography step we built a reflective binary grating that mimics the functionality of a blazed diffraction grating in a flat geometry. We have also demonstrated that efficient subwavelength resonant devices for visible wavelengths can be built using silicon.

Additional Information

© 2011 Optical Society of America. Received January 31, 2011; revised March 17, 2011; accepted March 19, 2011; posted March 21, 2011 (Doc. ID 141947); published April 15, 2011.

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