Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence

Creators: Gregoire, John M.; Dale, Darren; Kazimirov, Alexander; DiSalvo, Francis J.; van Dover, R. Bruce

Abstract

We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent.

Additional Information

© 2010 American Vacuum Society. Received 4 June 2010; accepted 20 July 2010; published 3 September 2010. This material is based on the work supported as part of the Energy Materials Center at Cornell (EMC2), an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award No. DE-SC0001086. This work is based on the research conducted at the Cornell High Energy Synchrotron Source (CHESS), which is supported by the National Science Foundation and the National Institutes of Health/National Institute of General Medical Sciences under NSF Award No. DMR-0225180.

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