MgZnO/ZnO heterostructures with electron mobility exceeding 1 × 10⁶ cm²/Vs

Creators: Falson, Joseph; Kozuka, Yusuke; Uchida, Masaki; Smet, Jurgen H.; Arima, Taka-hisa; Tsukazaki, Atsushi; Kawasaki, Masashi

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Abstract

The inherently complex chemical and crystallographic nature of oxide materials has suppressed the purities achievable in laboratory environments, obscuring the rich physical degrees of freedom these systems host. In this manuscript we provide a systematic approach to defect identification and management in oxide molecular beam epitaxy grown MgZnO/ZnO heterostructures which host two-dimensional electron systems. We achieve samples displaying electron mobilities in excess of 1 × 10⁶ cm²/Vs. This data set for the MgZnO/ZnO system firmly establishes that the crystalline quality has become comparable to traditional semiconductor materials.

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© 2016 The Author(s). This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article's Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ Received 09 February 2016. Accepted 29 April 2016. Published 27 May 2016. We acknowledge discussions with K. von Klitzing, W. Dietsche, D. Maryenko and the technical assistance of S. Akasaka, K. Nakahara and the staff at Epiquest. This work was partly supported by JSPS Grant-in-Aid for Scientific Research(S) No. 24226002 and for Young Scientist (A) No. 23686008 and the "Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program)", initiated by the Council for Science and Technology Policy (CSTP). This work was carried out by joint research of the Cryogenic Research Center, the University of Tokyo. Author Contributions: J.F. performed the experiments, analysed the data and wrote the manuscript. J.F., Y.K., M.U., J.H.S., T.-h.A., A.T. and M.K. discussed the MBE design, results and manuscript. M.K. supervised the project. The authors declare no competing financial interests.

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