Published December 23, 2019 | Published
Journal Article Open

Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers

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Abstract

We present passive, visible light silicon nitride waveguides fabricated on ≈ 100 µm thick 200 mm silicon wafers using deep ultraviolet lithography. The best-case propagation losses of single-mode waveguides were ≤ 2.8 dB/cm and ≤ 1.9 dB/cm over continuous wavelength ranges of 466-550 nm and 552-648 nm, respectively. In-plane waveguide crossings and multimode interference power splitters are also demonstrated. Using this platform, we realize a proof-of-concept implantable neurophotonic probe for optogenetic stimulation of rodent brains. The probe has grating coupler emitters defined on a 4 mm long, 92 µm thick shank and operates over a wide wavelength range of 430-645 nm covering the excitation spectra of multiple opsins and fluorophores used for brain stimulation and imaging.

Additional Information

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. Received 26 Aug 2019; revised 6 Nov 2019; accepted 11 Nov 2019; published 11 Dec 2019. We thank Dr. Huang Ying, Dr. Laurent Moreaux, Dr. Eran Segev, and Dr. Trevor Fowler for assistance and helpful discussions. Funding: Canadian Institutes of Health Research (302353-381345); Natural Sciences and Engineering Research Council of Canada (CHRP 508406-17); National Institutes of Health (NS090596, NS099726); Kavli Nanoscience Institute.

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