Published April 2005
| public
Journal Article
Pushing the limits of macroporous silicon etching
- Creators
- Matthias, S.
- Müller, F.
- Schilling, J.
- Gösele, U.
Abstract
We present a detailed investigation of the fabrication of almost perfect three-dimensional microstructures grown by a photoelectrochemical etching process. The focus is directed on the physical effects that have limited the achievable pore shapes to very smooth modulations. These limits can be overcome by an improved etching process allowing strongly modulated three-dimensional networks. In particular, the chronology of the growth of a single modulation is shown.
Additional Information
© 2005 Springer-Verlag. Received: 10 December 2004; Accepted: 13 December 2004; Published online: 27 January 2005.Additional details
- Eprint ID
- 100774
- Resolver ID
- CaltechAUTHORS:20200116-160100324
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2020-01-17Created from EPrint's datestamp field
- Updated
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2021-11-16Created from EPrint's last_modified field