AlN Piezoelectric Nanoelectromechanical Isolator via Parametric Frequency Conversion and Amplification
Abstract
We report on a novel aluminum nitride (AlN) resonant nanoelectromechanical systems (NEMS) approach to realizing an electrically tunable nonreciprocal isolator by exploiting nonlinear parametric frequency conversion and efficient mechanical amplification in a radio-frequency (RF) AlN membrane NEMS resonator. The isolator is constructed by combining frequency conversion enabled by the NEMS resonator's strong parametric effect, and tandem band-pass filtering, so that the signal can be transmitted or blocked according to its propagation direction and frequency. In the band of the isolator that is set by the NEMS resonance, it exhibits up to ∼60dB signal isolation between measured S₂₁ and S₁₂ transmission. Further, the isolation band frequency and width can be tuned via a dc polarization voltage.
Additional Information
© 2019 IEEE. We thank the support from the Army Research Office (ARO, Grant W911NF1610340). We thank Dr. Jia Hao for useful discussions. M.H.M. and M.L.R. thank the support from ARO (Grant W911NF13-1-0240). We thank CEA-Leti (Grenoble, France) for the piezoelectric multilayers. We also thank the important support and infrastructure from the Kavli Nanoscience Institute (KNI) at Caltech.Additional details
- Eprint ID
- 99454
- Resolver ID
- CaltechAUTHORS:20191025-124827590
- W911NF16-1-0340
- Army Research Office (ARO)
- W911NF13-1-0240
- Army Research Office (ARO)
- Kavli Nanoscience Institute
- Created
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2019-10-25Created from EPrint's datestamp field
- Updated
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2021-11-16Created from EPrint's last_modified field
- Caltech groups
- Kavli Nanoscience Institute