Published September 30, 2019
| Published
Journal Article
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Hybrid silicon on silicon carbide integrated photonics platform
Abstract
We demonstrate a hybrid on-chip photonics platform based on crystalline silicon resonators and waveguides patterned on top of silicon carbide. The devices were fabricated with membrane transfer followed by standard electron beam patterning procedures. The platform allows the integration of high quality silicon photonics with color centers in silicon carbide operating in the near infrared for spin-photon interfaces used in quantum information processing applications. We measure waveguide-coupled ring resonators with loaded quality factors up to 23 000 at cryogenic temperatures.
Additional Information
Published under license by AIP Publishing. Submitted: 22 June 2019 . Accepted: 19 August 2019 . Published Online: 02 October 2019. The authors would like to thank Yu Horie, Jake Rochman, Ehsan Arbabi, and Seyedeh Mahsa Kamali for discussions on fabrication techniques as well as Jon Kindem for discussions on setting up an external cavity tunable laser. We acknowledge funding from AFOSR Quantum Transduction Multidisciplinary University Research Initiative (No. FA9550-15-1-002). C.W. acknowledges support from Japan Student Support Organization (JASSO). I.C. acknowledges support from the Natural Sciences and Engineering Research Council of Canada (NSERC) (No. PGSD2-502755-2017).Attached Files
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Additional details
- Eprint ID
- 99010
- Resolver ID
- CaltechAUTHORS:20191002-094950752
- FA9550-15-1-002
- Air Force Office of Scientific Research (AFOSR)
- Japan Student Services Organization (JASSO)
- PGSD2-502755-2017
- Natural Sciences and Engineering Research Council of Canada (NSERC)
- Created
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2019-10-02Created from EPrint's datestamp field
- Updated
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2021-11-16Created from EPrint's last_modified field