Imaging Multimode Vibrations in High-Frequency Aluminum Nitride Piezoelectric Nanomembrane Resonators
Abstract
We report on the first imaging and visualization of the multimode resonant behaviors of aluminum nitride (AlN) piezoelectric nanomembrane resonators, by exploiting a spectromicroscopy technique based on scanning laser interferometry. High-frequency multimode vibrations (up to 33MHz) with quality (Q) factors up to ~8500 are observed in the AlN nanomembranes. Both undriven thermomechanical and coherently excited vibrations of the devices are measured and spatially mapped. Such a multimode AlN device platform with abundant resonant modes, two-dimensional (2D) large capturing surfaces, and efficient all-electrical signal transduction, holds strong promise for enabling ultrasensitive gravimetric detection, mass spectroscopy, and inertial imaging.
Additional Information
© 2019 IEEE. H.J. and P.X.-L.F. acknowledge support from the National Science Foundation (NSF) through SNM Grant (CMMI-1246715), EPMD Grant (ECCS-1408494), and CCSS Grant (ECCS-1509721). M.L.R. and M.H.M. gratefully acknowledge support from the U.S. Army Research Office (ARO) under Grant W911NF13-1-0240.Additional details
- Eprint ID
- 98333
- DOI
- 10.1109/transducers.2019.8808643
- Resolver ID
- CaltechAUTHORS:20190829-100210861
- NSF
- CMMI-1246715
- NSF
- ECCS-1408494
- NSF
- ECCS-1509721
- Army Research Office (ARO)
- W911NF13-1-0240
- Created
-
2019-08-30Created from EPrint's datestamp field
- Updated
-
2021-11-16Created from EPrint's last_modified field
- Caltech groups
- Kavli Nanoscience Institute