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Published August 2019 | Published
Journal Article Open

Spreading of rinsing liquids across a horizontal rotating substrate

Abstract

''Rinsing" liquids and their dynamics are interesting both fundamentally in the interaction of several classic modes of spreading, and industrially in a variety of cleaning applications, such as in the manufacturing of silicon wafers. In this paper, we investigate the time-dependent spreading behavior of a rinsing liquid across a horizontal, rotating substrate; the rinsing liquid is applied to the center of the rotating substrate as an orthogonal impinging jet of constant volumetric flow. We present experimental findings on the azimuthally averaged outer radius of the spreading liquid, in which we observed four distinct growth behaviors in time. We use lubrication theory to explain these phenomena and to define boundaries within the explored parameter space where each was observed. In the absence of rotation, capillarity dominates and the spreading radius grows as t^(4/10). When centrifugal forces dominate the spreading process, several time dependencies of the spreading radius are possible, with lubrication theory predicting exponential growth as well as power laws of t^(3/4) and t^(3/2).

Additional Information

© 2019 American Physical Society. Received 6 December 2018; published 7 August 2019. The authors are grateful for funding from Lam Research, the Lam Foundation, NSF CBET Grants No. 1335632 (D.J.W., G.G.F.), and No. 1435683 (J.M.F., G.G.F.). We gratefully acknowledge the equipment support of Lam Research in constructing the apparatus. We would like to thank Prof. John Brady for a productive discussion regarding inertial lubrication. The authors would also like to thank the referees for useful comments towards clarifying explanations of the findings. D.J.W. and A.S.Y. contributed equally to this work.

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Published - PhysRevFluids.4.084102.pdf

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August 19, 2023
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