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Published May 2000 | Published
Book Section - Chapter Open

Integrated chemical sensors based on carbon black and polymer films using a standard CMOS process and post-processing

Abstract

We present an integrated chemical sensor array fabricated using a CMOS process followed by post-processing. The sensor presented in this paper incorporates 324 individually addressable sensing nodes. Post processing involves an electroless nickel and gold plating step to fabricate sensing contacts, and the deposition of a carbon black based polymer sensor material. The operation of the integrated sensor is confirmed. This sensor technology will allow the creation of large arrays of chemically diverse sensors.

Additional Information

© 2000 IEEE. This work was supported by DARPA under DAAK6097K9503. The authors would like to thank Charles Grosjean for his assistance with the profilometery measurements, Tom Tsao and Phil Stapleton for their input on the plating procedure, and Nate Lewis, Erik Severin and Shawn Briglin for their assistance with the chemical sensors.

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