Published June 2003
| Published
Book Section - Chapter
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A parylene MEMS flow sensing array
- Creators
- Meng, Ellis
-
Tai, Yu-Chong
Abstract
We have demonstrated the first parylene MEMS thermal sensor array capable of detecting small flows down to 0.5 µl/min. The device is fabricated using low-temperature parylene/platinum technology and consists of metallic sensors suspended on a membrane over a bulk micromachined silicon channel. For the first time, insightful results from three different methods of flow sensing using a single device are studied and compared. Multi-mode testing using hot film, calorimetric, and time-of-flight techniques at low overheat ratios has been performed. Thus, this device is biocompatible in both construction and operation.
Additional Information
© 2003 IEEE. This work was funded in part by the Engineering Research Centers Program of the National Science Foundation under Award Number EEC-9402726. We would like to thank Mr Trevor Roper for assistance in fabrication and Mr. Tuan Hoang for help with experiments and proofreading.Attached Files
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Additional details
- Eprint ID
- 94149
- Resolver ID
- CaltechAUTHORS:20190326-112949514
- EEC-9402726
- NSF
- Created
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2019-03-26Created from EPrint's datestamp field
- Updated
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2021-11-16Created from EPrint's last_modified field