Published May 2001
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Diffractive lens fabrication by replica molding
- Creators
- Lee, Benjamin G.
- Scherer, Axel
Abstract
Diffractive lenses and 2-D gratings were fabricated using electron-beam lithography and replica molding. With electron-beam lithography, feature sizes smaller than 60 nm can be achieved. We demonstrate that we can achieve similar feature sizes with replica molding. High-fidelity replica molding can become an important tool to complement electron-beam lithography in the fabrication of DOEs and other nanostructures.
Additional Information
© 2001 IEEE.Attached Files
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