Design and fabrication of a large vertical travel silicon inchworm microactuator for the Advanced Segmented Silicon Space
- Other:
- Janson, Siegfried W.
Abstract
Future concepts for ultra-large lightweight space telescopes include the telescopes with segmented silicon mirrors. This paper describes a proof-of-concept inchworm actuator designed to provide nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space. A vertically actuating inchworm microactuator is proposed to achieve large actuation travel by incorporating compliant beam structures within a silicon wafer. An inchworm actuator unit consists of a piezoelectric stack actuator, a driver, a pair of holders, a slider, and a pair of polymer beams connected to a centrally clamped flexure beam. Deep reactive ion etch experiments have been performed for constructing the actuator.
Additional Information
© 2003 Society of Photo-optical Instrumentation Engineers (SPIE). The Jet Propulsion Laboratory, California Institute of Technology carried out the research described in this paper under a contract with the National Aeronautics and Space Administration.Attached Files
Published - 107.pdf
Files
Name | Size | Download all |
---|---|---|
md5:e18c58ffa55ddd7e54c5fe9f2d85b46b
|
1.3 MB | Preview Download |
Additional details
- Eprint ID
- 92269
- Resolver ID
- CaltechAUTHORS:20190114-161759499
- NASA/JPL/Caltech
- Created
-
2019-01-15Created from EPrint's datestamp field
- Updated
-
2021-11-16Created from EPrint's last_modified field
- Series Name
- Proceedings of SPIE
- Series Volume or Issue Number
- 4981