Published February 13, 2018
| Submitted
Discussion Paper
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Stacked Wafer Gradient Index Silicon Optics with Integral Anti-reflection Layers
Chicago
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Abstract
Silicon optics with wide bandwidth anti-reflection (AR) coatings, made of multi-layer textured silicon surfaces, are developed for millimeter and submillimeter wavelengths. Single and double layer AR coatings were designed for an optimal transmission centered on 250 GHz, and fabricated using the DRIE (Deep Reaction Ion Etching) technique. Tests of high resistivity silicon wafers with single-layer coatings between 75 GHz and 330 GHz are presented and compared with the simulations.
Additional Information
This work was funded by NASA (Grant NNX15AE01G).Attached Files
Submitted - 1802.04854.pdf
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1802.04854.pdf
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Additional details
- Eprint ID
- 92106
- Resolver ID
- CaltechAUTHORS:20190107-095816933
- NASA
- NNX15AE01G
- Created
-
2019-01-07Created from EPrint's datestamp field
- Updated
-
2023-06-02Created from EPrint's last_modified field
- Caltech groups
- Astronomy Department