Published June 2017
| public
Book Section - Chapter
Efforts toward ideal microelectromechanical switches
Abstract
Since a microelectromechanical (MEM) switch with an electrostatically actuated cantilever was first demonstrated by Petersen in 1978 [1], MEM switches have actively been researched by many research groups. However, comparing with the conventional metal-oxide-semiconductor fieldeffect transistor (MOSFET), MEM switches are still suffering from their high actuation voltage and insufficient operational reliability, which still remain as a difficult challenge to many MEMS researchers and hinder commercialization of the MEM switches. In this work, we look at what lies behind these difficulties in MEM switches and illustrate bright ideas that have been sought to enhance the actuation voltage and switch endurance (lifetime) problems.
Additional Information
© 2017 IEEE. This work has been supported by the Global Frontier Project under Grant No. CISS-2012054187.Additional details
- Eprint ID
- 85413
- DOI
- 10.1109/TRANSDUCERS.2017.7994015
- Resolver ID
- CaltechAUTHORS:20180322-101503751
- CISS-2012054187
- Ministry of Science, ICT and Future Planning (Korea)
- Created
-
2018-03-26Created from EPrint's datestamp field
- Updated
-
2021-11-15Created from EPrint's last_modified field