Nanomotor lithography

Abstract

The rapid miniaturization of devices and machines has fuelled the evolution of advanced fabrication techniques. However, the complexity and high cost of the state-of-the-art high-resolution lithographic systems are prompting unconventional routes for nanoscale patterning. Inspired by natural nanomachines, synthetic nanomotors have recently demonstrated remarkable performance and functionality. Here we report a new nano-patterning approach, named 'nanomotor lithography', which translates the autonomous movement trajectories of nanomotors into controlled surface features. As a proof of principle, we use metallic nanowire motors as mobile nanomasks and Janus sphere motors as near-field nanolenses to manipulate light beams for generating a myriad of nanoscale features through modular nanomotor design. The complex spatially defined nanofeatures using these dynamic nanoscale optical elements can be achieved through organized assembly and remote guidance of multiple nanomotors. Such ability to transform predetermined paths of moving nanomachines to defined surface patterns provides a unique nanofabrication platform for creating diverse nanodevices.

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