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Published October 1978 | Published
Journal Article Open

Holographic interference lithography for integrated optics

Abstract

In this paper, some of our recent work in the use of holographic interference lithography and various material removal techniques to corrugate thin-film optical waveguides are reviewed. The specific applications of these periodic thin-film devices in the distributed feedback and distributed Bragg reflector semiconductor laser, and as output grating couplers, are described. Recent results in the use and fabrication of chirped and curved-line gratings are also summarized.

Additional Information

© 1978 IEEE. Manuscript received February 29, 1978; revised June 15,1978. This work was supported by the Air Force Office of Scientific Research and the National Science Foundation.

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August 19, 2023
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