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Published June 1987 | Published
Book Section - Chapter Open

Submillimeter-wave antennas on thin membranes

Abstract

Submillimeter-wave antennas with bismuth microbolometer detectors have been fabricated on 1-μm thick silicon-oxynitride membranes. This approach results in better patterns than previous lens-coupled integrated circuit antennas, and eliminates the dielectric loss associated with the substrate lens. Measurements on a wideband log-periodic antenna at 700 GHz, 380 GHz and 167 GHz, and on a 700 GHz log-periodic imaging array, show no sidelobee and a 3-dB beamwidth between 40° and 50°. Also, the effective area can be increased by 5 dB by the use of a back-shorting mirror. Possible application areas are superconducting tunnel junction receivers for radio astronomy and imaging arrays for plasma diagnostics.

Additional Information

© 1987 IEEE. We thank Dr. Peter Siegel at the National Radio Astronomy Observatory for suggesting the use of log-periodic antennas. We thank Dr. W. R. Snow at Pacific Western Systems for his advice in the deposition of the silicon-oxynitride layer. This work was supported by contracts from the Army Research Office, the Department of Energy and JPL's program in innovative research.

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August 19, 2023
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