Bridging ultrahigh-Q devices and photonic circuits
Abstract
Optical microresonators are essential to a broad range of technologies and scientific disciplines. However, many of their applications rely on discrete devices to attain challenging combinations of ultra-low-loss performance (ultrahigh Q) and resonator design requirements. This prevents access to scalable fabrication methods for photonic integration and lithographic feature control. Indeed, finding a microfabrication bridge that connects ultrahigh-Q device functions with photonic circuits is a priority of the microcavity field. Here, an integrated resonator having a record Q factor over 200 million is presented. Its ultra-low-loss and flexible cavity design brings performance to integrated systems that has been the exclusive domain of discrete silica and crystalline microcavity devices. Two distinctly different devices are demonstrated: soliton sources with electronic repetition rates and high-coherence/low-threshold Brillouin lasers. This multi-device capability and performance from a single integrated cavity platform represents a critical advance for future photonic circuits and systems.
Additional Information
© 2018 Macmillan Publishers Limited, part of Springer Nature. Received: 10 September 2017; Accepted: 12 February 2018; Published online: 19 March 2018. Data availability: The data that support the plots within this paper and other findings of this study are available from the corresponding author upon reasonable request. We thank O. Painter and B. Baker for assistance with the PECVD silicon nitride process, H. Atwater and W.-H. Cheng for assistance with silica atomic layer deposition, M. Hunt for assistance with electron-beam microscopy, Y.-H. Lai for technical assistance, and A. Matsko and J. Bowers for helpful discussions. We also gratefully acknowledge the Defense Advanced Research Projects Agency under the DODOS (award no. HR0011-15-C-0055, sub award KK1540) and PRIGM:AIMS (grant no. N66001-16-1-4046) programs and the Kavli Nanoscience Institute. Author Contributions: K.Y.Y., D.Y.O., S.H.L. and K.V. conceived the fabrication process and resonator design. K.Y.Y., D.Y.O. and S.H.L. fabricated and tested the resonator structures with assistance from B.S. and H.W. K.Y.Y., D.Y.O., S.H.L., Q.F.Y., X.Y., B.S. and H.W. conducted soliton and Brillouin laser measurements. All authors analysed the data and contributed to writing the manuscript. The authors declare no competing interests.Attached Files
Submitted - 1702.05076.pdf
Supplemental Material - 41566_2018_132_MOESM1_ESM.pdf
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Additional details
- Alternative title
- Integrated Ultra-High-Q Optical Resonator
- Alternative title
- Bridging ultra-high-Q devices and photonic circuits
- Eprint ID
- 78326
- DOI
- 10.1038/s41566-018-0132-5
- Resolver ID
- CaltechAUTHORS:20170619-095450945
- Defense Advanced Research Projects Agency (DARPA)
- HR0011-15-C-0055
- Office of Naval Research (ONR)
- N66001-16-1-4046
- Kavli Nanoscience Institute
- Created
-
2017-06-19Created from EPrint's datestamp field
- Updated
-
2021-11-15Created from EPrint's last_modified field
- Caltech groups
- Kavli Nanoscience Institute