Published June 1995
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A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems
Abstract
Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm x 1 mm X 5µm in size together with polysilicon bending supports. Experimentally, it can lift a 87 µN (or 8.88 mg) force under a magnetic field of approximately 2 x 10^4 A/m. A proposed synchronous driving mode has been observed, and both translation and rotation of a silicon chip has been demonstrated.
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